Operating Range:320mm
Maximum Load Capacity:30kg
Speed Control:Variable Speed Motor
Cleanroom Compatibility:Class 100 Cleanroom Certified
Robust Construction:Stainless Steel Frame
Safety Features:Emergency Stop, Overload Protection
The DYNAX 65AX-089 Wafer Transfer Robot Set, 320mm Module is an advanced solution for semiconductor manufacturers aiming to enhance productivity and reduce human error in wafer transfer operations. With its compact yet robust design, this robot ensures minimal downtime and high reliability in production lines.
Featuring a precision robotic arm that can extend up to 320mm, this set is capable of reaching into tight spaces within manufacturing chambers for precise wafer manipulation. It is designed to handle loads of up to 20kg, making it versatile for various wafer sizes and types.
The system boasts unparalleled speed and accuracy, enabling it to transfer wafers at a rate of 0.1mm precision and with a speed accuracy of ±0.02 seconds. This level of control is crucial for maintaining the quality of semiconductor products during the manufacturing process.
Ease of Integration is another highlight of the DYNAX 65AX-089. It is compatible with industry-standard automation systems, allowing for a seamless integration into existing manufacturing setups without significant modifications. This feature minimizes setup time and maximizes operational efficiency.
Energy efficiency is a key aspect of this robot’s design. It includes an adjustable power consumption mechanism that helps in reducing energy usage without compromising on performance, contributing to sustainable manufacturing practices.
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